Beilstein J. Nanotechnol.2020,11, 966–975, doi:10.3762/bjnano.11.81
previously obtained through anodizing GaAs(100) wafers in alkaline KOH electrolyte. An IR photodetector based on the GaAs nanowires is demonstrated.
Keywords: anodization; crystallographically oriented pores; gallium arsenide (GaAs); nanowires; neutral electrolyte; photocurrent; porousGaAs; Introduction
number of tilted pores. One can conclude that etching in HNO3 electrolyte suppresses the nucleation of tilted pores as compared to anodization in HCl or H2SO4 electrolyte, resulting in the fabrication of non-porousGaAs nanowires, which are better suitable for photodetector applications. High-aspect
needed for such structures, which makes photolithography challenging [38].
Conclusion
This study demonstrates possibilities to produce porousGaAs structures with a controlled degree of porosity through the anodization of GaAs(111) wafers in a neutral, environmentally friendly NaCl electrolyte. Porous
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Figure 1:
SEM images in cross section of porous GaAs layers for three different conditions of anodization in ...